多片一体式连续净化炉:
- The walking beam system with high clean performance has been adopted.
- A bulk transfer of the glass substrate loaded in a heat-resistant cassette has realized high production efficiency.
Available glass size | ~W1500×L1850mm | |
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Temperature range | 80~250℃ | |
Temperature uniformity | ±3℃ | |
Cleanliness | Class 10 (0.3μm) | |
Applications | Re-polyimide, Annealing, Baking |
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