对应8inch Wafe的立式炉:
- Large batch, Max 150 wafers batch processing
- Max 20 cassette stocks
- Excellent temperature control from low to medium high temperature range by use of LGO heater
- High-speed wafer transfer by use of single/five wafers handling robot
- Equipped with operator friendly high performance control system
| Outer dimension | W900×D2300×H3250mm | |
|---|---|---|
| Heater | LGO heater(ID ø400mm) | |
| Flat zone length | 960mm | |
| Wafer size | 8inch | |
| Batch size | 150wafers | |
| I/O port | 2 | |
| Number of FOUP stock | 20(standard) | |
| Finger | 5wafers+single wafer | |
| Controller | Model VSC1000 | |
| Option | Forced-cooling system, N2 load lock, HOST communication(HSMS/GEM), Thin wafer (100μm or more)handling, SMIF operation |
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