大口径立式炉：
- Available for vacuum/atmospheric pressure process
- Available for various gases
- Substrate size: 730×930 mm (Typical)
(To be discussed for other size.) - Excellent temp performance of large LGO heater
| Outer dimension | W2000×D2000×H4200mm (furnace body) | |
|---|---|---|
| Heater | LGO heater | |
| Operation temperature | RT~700℃ | |
| substrate size | 730×920 (G4) | |
| Batch size | 20~25 | |
| Flat zone temperature | to ±3℃ | |
| Chamber material | high-grade quarts | |
| Controller | Model VSC1000 | |
| Option | Forced-cooling system, HOST communication(SECS/GEM) |
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