Model 206A：
- share in domestic market
- Handles 100 to 200 mm square wafer
- Batch: 200 to 400 wafers processing is available(depends on flat zone length and wafer pitch)
- First heating up and cooling down, reduced power by KTS' exclusive LGO heater
| Outer dimension | W850×L6700×H2500mm (three-stage furnace) | |
|---|---|---|
| Heater | LGO heater | |
| Flat zone length | 1000mm | |
| Temp. control | 3~5 Zone | |
| Transfer equipment | Boat loader |
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