晶圆扩膜机 (Wafer Expander)性能及特点为:
很均匀的扩张已切割或破裂的晶圆,使它能达到所需晶粒的距离,然后改善切割后的制程及晶粒的处理
Uniformly expands diced and 1 or fractured wafers to produce the required die interval .Signilicantly improves post-dicing chip/die handing.
特点:
1. 有不同种的扩张比率.
2. 可调整的扩张速度.
3. 配备温度扩张台.
4. 扩张胶膜及晶圆可自动被固定的.
5. 扩张夹具为树脂锈花圈或环状夹紧物,由内圈和外圈组成,可自动夹紧被扩张的晶圆和胶膜.
6. 简单的机械装置,免维修的设计.
Features:
1. Expansion ratio can be freely varied.
2. Expansion speed is also variable.
3. Equipped with a heated expansion stage
4. Expanded film / wafer can be griped automatically.
Features:
1. Expansion ratio can be freely varied.
2. Expansion speed is also variable.
3. Equipped with a heated expansion stage
4. Expanded film / wafer can be griped automatically.
5. Resin double rings / grip rings the expansion jig consisting of inner and outer ones for automatic grips of expanded wafer / film.
6. Simple mechanism maintenance-free design.
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