
检测气体 | 化学式 | 测量范围(刻度) | 报警点 | 第二报警点 |
硅烷 | SiH4 | 0-15ppm(0.1ppm) | 5ppm | 10ppm |
磷烷 | PH3 | 0-1ppm(0.01ppm) | 0.3ppm | 0.6ppm |
臭氧 | O3 | 0-1ppm(0.01ppm) | 0.3ppm | 0.6ppm |
氟 | F2 | 0-3ppm(0.02ppm) | 1ppm | 2ppm |
| HCl | 0-15ppm(0.1ppm) | 5ppm | 10ppm |
氟化氢 | HF | 0-9ppm(0.05ppm) | 3ppm | 6ppm |
溴化氢 | HBr | 0-9ppm(0.05ppm) | 3ppm | 6ppm |
氨 | NH3 | 0-75ppm(0.5ppm) | 25ppm | 50ppm |
砷烷 | AsH3 | 0-200ppm(1ppb) | 50ppm | 100ppm |
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