High-Accuracy Capacitance diaphragm gauge | Pirani gauge | Cold cathode Ionization gauge | Hot cathode Ionization vacuum gauge | Combination vacuum gauge
High-accuracy capacitance diaphragm gauge
High-accuracy capacitance diaphragm gauge (F-tron series)
| Features and application |
| • Resolving power of display: 6 1/2 orders of magnitude (digits) (about 2 digits improved vs. conventional) • Precision: 0.1% R • Notable improvement in noise resistance due to pulsed signal transmission • High-speed data communication and automatic zero-point correction possible • 1/2 or less of unit volume vs. conventional • Process pressure monitoring for film-making device • Pressure monitoring for gas-replacement and gas-inclusion • Pressure monitoring for vacuum distillation, drying, etc. |
•Product specification
| Item | Specification |
| Model | FTR-1 (6 1/2 digits indicator) + F-133K (sensor) |
| Full-scale range | 133kPa |
| Display resolving power | 1ppm @ F.S. |
| Precision | 0.1% R (at 23ºC) |
| Zero temperature coefficient | between 10 to 50ºC of service temperature |
| Temperature coefficient span | between 10 to 50ºC; of service temperature |
| Data-renewal rate | 2.2 msec MAX |
| Digital communication | 4-line system, all dual ch. |
| Output signal | DC0V - 10V |
| Set point output | 3-points, photo-coupler, 30VDC, 0.2 A or less |
| Display | decimal 6 1/2 digits for pressure display, unit, set-point, stable temperature |
| Input power | non-heating type: +24 VDC 0.2 A MAX |
| Ambient temperature | at operation: 10 to 50ºC at storage: -10 to 70ºC |
| Material used in vacuum part | Silicon, SiO2, SUS304, Viton |
| Vacuum connection | VCR8 |
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