High-Accuracy Capacitance diaphragm gauge | Pirani gauge | Cold cathode Ionization gauge | Hot cathode Ionization vacuum gauge |
Combination vacuum gauge
| Pirani gauge |
| Pirani gauge Transducer [TRP-10/TRP-10SP] |
| Features and application |
| • Low-cost design by unified sensor and control circuit • Wide range measurement covering from atmospheric pressure to 5x10 Pa • High-accuracy with significant improvement in temperature correction due to adoption of digital circuit • Light-weight and compact due to digital circuit and unique filament structure • Output of 0 to10 VDC in proportion to pressure can be converted to pressure by means of log-linear equation • Best suitable for automation with standard installation of RS-485 digital communication • Transducer TRP-10: driven by 12 to 30 VDC power, power-indicator TR- 1DA and TR-1DB: driven by 100 to 240 VAC power • Best suitable for low vacuum measurement of various vacuum systems • Best suitable for pressure monitoring of various processes • Optional TRP-10SP: equipped with 2 set-points and best suitable for pressure detection at valve on/off etc. as a vacuum switch • Best suitable for automation of various vacuum systems. |
Sensor part
| Type, modelPirani Type transducer: TRP-10/TRP-10SPTemperature rangeat operation: 5 to 60ºC at storage: -10 to 65ºCMaterial used in coverABS-resinProtector structurecorresponding to IP40Cable length100 m or less (use twisted pair shield wire)Vacuum connectionNW16 (standard)ф15 (option)Exterior dimension drawing[PDF] [DXF]Massca. 120 g/130 g (TRP-10SP) |
•Circuit part
| Measuring systemconstant temperature systemMeasuring range1.0 X 105 to 5.0 X 10-2PaPressure resolving powerMantissa (2-digits including 1 digit under decimal point) + exponential with signAnalog outputDC 0 to 10V output voltage =LOG(P)+3 load resistance: 10kΩ or morevoltage resolving power: 2.4mVAttachmentatmospheric pressure (ATM), high vacuum (HV),volume adjustable from outsideDigital communicationRS-485, 2-line system, semi-dual, number of channels: 0 to 15ch(9600bps, 8databits, even parity, 1stopbit)Set point*2-points independent,NPN-open collector system,negative logic, output rating:DC 30V 50mAPower ratingDC24V(12 to 30V) 35mA/55mA(TRP-10SP) |
| * Set-point is TRP-10SP. |
| Feature and application |
| • Power indicator for Pirani gauge transducer:TRP-10 • No pressure conversion error occurs on indicator due to digital communication of pressure signal from transducer • Maximum 3 units of TRP-10 can be connected for real-time measurement. Monitoring from outside possible due to installment of 3-channeled analog output and RS-485 • Six set-point output can be assigned freely to any of 3 transducers: for example, to each one of 3 transducers can be assigned 2 points respectively, or to 1 transducer 6 points. • Power voltage is flexible between 100 to 240VAC. |
Connection example}
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Product specification
| Responding transducer | TRP-10, connection number 3 points Connector: D-SUB 9P |
| Measuring range | depends on connected transducer |
| Pressure display | Mantissa (2-digits including 1 digit under decimal point) + sign + exponential 1 digit, unit: Pa |
| Transducer communication | RS-485 communication: ch=0, ch2=1, ch3=2-channel number fixed Communication cycle: 200 msec/3ch |
| Analog output | Pressure signal: 3ch 0 to 10 VDC (at load resistance: 10KΩ or more) |
| Output/input from outside | Output:set-point x6, transducer status X 3, system status NPN open collector output (photo-coupler insulated)rating: 30VDC/50mA or lessInput:Outside mode selection, sensor on/off X 3, indicated CH-switching X 2 bitPower input (photo-coupler insulated) |
| Up-level link communication | Communication:RS-485 4-line system, all dualcommunication specification:9600/4800/2400/1200bps, 8databits, even/odd/no parity, 1/2stopbitCommunication address:0 to 97 (function setup system) 3ch dedicated |
| Rating power | AC100 to 240V±10%, 50/60Hz, 30VA |
| Exterior dimension | 96(W) X 96(H) X 166.4(D)[mm] (excluding protrusion) |
| Mass | ca. 820g |
Power indicator for transducer [TR-1DB]
| Features and application |
| • Power indicator for Pirani gauge transducer:TRP-10 • No pressure conversion error occurs on indicator due to digital communication of pressure signal from transducer • Two set-points are equipped. • Power voltage is flexible between 100 to 240VAC. • Easy key-operation with compact body (H48 X W98 X D131 mm) • Best suitable as pressure monitor of various processes |
Product specification
| Responding transducer | TRP-10 connection number: 1 point Connector: D-SUB 9P |
| Measuring range | 1.0 X 105 to 5.0 X 10-2Pa |
| Pressure display | Mantissa (2-digits including 1 digit under decimal point) + sign + exponential 1 digit, unit: Pa |
| Transducer communication | RS-485 communication: zero-fixed channel number, communication cycle: 100 msec. |
| Setting | Front key-input program system Set function: SP 1 to 2 |
| Output/input from outside | Output:set-point 1.2, status NPN open collector output (photo-coupler insulated)rating: 30VDC/50mA or lessInput:Outside mode selection, sensor on/off Voltage input (photo-coupler insulated)Rating: DC24V ±10%, 4.1mA Typ,Connector:high density D-SUB 15P |
| Rating power | AC100 to 240V ±10%, 50/60Hz |
| Service temperature range | 5 to 60ºC (storage temperature: -10 to 65ºC) |
| Protection structure corresponding to | IP 40(interior steel plate closed type) |
| Exterior dimension drawing | [PDF] [DXF] |
| Installing method | panel-burying method (with metal fitting) dimension of installing hole: 2(W) X 45(H)[mm] (+0.5, -0mm) |
| Mass | ca. 530g |
Pirani gauge unit
PSG-1
| Features and application |
| • Sensor + control circuit unified • Driven by power voltage of 12 to 24DCV • Recording output installed • In the case of filament breaking, for example, replacement of sensor part only is feasible to cope with, since sensor and control circuit are separable. • Optionally, 2-points setting of set-point output is feasible to use one as pressure switch. |
Product specification
| Measuring method | Constant temperature system | |
| Measuring range | 1.0 X 105 to 5.0 X 10-1Pa | |
| Pressure signal output | ||
| System | 4-20mA | |
| Load resistance | 400Ω or less | |
| Wire-breaking signal output | ||
| System | open collector | |
| Output logic | normal/close | |
| Rating | DC 30V/50mA | |
| Option output | set-point: 2 points independent | |
| System | open collector | |
| Output logic | normal/open | |
| Rating | DC 30V/50mA | |
| Power voltage | DC 12 to 15, 24V | |
| Current consumption | 150mA | |
Sensor part
| Service ambient temperature | 0 to 40ºC |
| Material for cover | Al |
| Color | Munsell value N-6.5 |
| Exterior dimension | 63ф X 120L |
| Vacuum connection | 15ф or NW16 (optional) |
| Exterior dimension drawing | [PDF] [DXF] |
| Connector shape | 9-pins D-SUB connector |
| Cable length | 100 m or less |
| Mass | ca. 200g |
PT-3DA
| Features and application |
| • The key operation is simple. •The set point is equipped with six. • With the recorder output. • It is equipped with RS485/RS422 serial communication(option) and it controls it with the host computer to 16 1 lines. It is possible to do the data management and it supports to make FA. • It is possible to connect a measurement child in a maximum of three.�iOption�j •The simultaneous display is possible in three measures with multi- display mode feature of it. • Various for the vacuum equipment. |
Product specification
| Measuring range | 1.0 X 105 to 1.0 X 10-1Pa | ||
| Sampling cycle | 100msec | ||
| Exterior output | Set-point | 6 points | |
| Auxiliary function | hysterics value, output theory | ||
| Rating | AC110V 0.5A load resistance | ||
| Status | AC110V 0.5A load resistance | ||
| REC OUTPUT | full range DC 0 to 5V/0 to 10V | ||
| Service temperature | 0 to 40ºC | ||
| Power voltage | AC100~240V 50/60Hz 30VA | ||
| Gauge head | PSG-1 | ||
| Mass | Main body | 1700g | |
| Gauge head | 200g | ||
| Exterior dimension drawing | [PDF] [DXF] | ||
| Panel cut dimension | |||
| Standard attachment | PSG-1(ф15)power cord:3mMeasuring cord:2m | ||
| Option | 2 to 3 ch simultaneous measurement BCD output 4 to 20 mA analog output RS 422A/RS-485 Printer output PSG-1 (NW 16) Measuring cord: 5, 10, 20 m | ||
PT-9P
| Features and application |
| • Easy readout due to adoption of large-sized analog meter of 2-ranges automatic switching • Low-price • Equipped with recorder output • For pressure monitoring • For research and development |
Product specification
| Measuring range | 1.0 X 105 to 1.3 X 10-1Pa | |
| Range | 2-range automatic switching | |
| Measurement | constant temperature measuring circuit | |
| REC OUT output | 1R+2R DC 0 to 10mV | |
| 1R , 2R DC 0 to 10mV | ||
| Service temperature | 0 to 40ºC | |
| Power voltage | AC100V 50/60Hz 10VA | |
| Gauge head | P-9 ф15 | |
| Mass | Main body | 1400g |
| Gauge head | 180g | |
| Exterior dimension drawing | [PDF] [DXF] | |
| Panel cut dimension | ||
| Standard attachment | Gauge head:P-9(ф15)Power cord:2mMeasuring cord:2m | |
| Option | Gauge head | P-9(NW16) |
| Measuring cord | 5 · 10 · 20m | |
PT-3P(M)
| Features and application |
| • Easy readout due to adoption of 1-range large-sized analog meter • Low-price • Equipped with recorder output • Meter-relay attached type available • Meter-relay attached type available • For research and development |
Product specification
| Measuring range | 1.3 X 102 to 1.3 X 10-1Pa | |
| Range | 1-range | |
| Measurement | constant voltage measuring circuit | |
| REC OUT output | 1-range DC 0 to 10mV | |
| Set output (M) | 2-points AC100V 1A | |
| Service temperature | 0 to 40ºC | |
| Power voltage | AC100V 50/60Hz 4VA | |
| Gauge head | P-3 ф15 | |
| Mass ( ): with meter-relay | Main body | 1200g(1900g) |
| Gauge head | 100g | |
| Exterior dimension drawing | [PDF] [DXF] | |
| Panel cut dimension | ||
| Gauge head | Gauge head:P-3(ф15)Power cord:2mMeasuring cord:2m | |
| Option | Gauge head | P-3(NW16) |
| Gauge head cord | 5 · 10 · 20m | |
PT-4P
| Features and application |
| • Small-sized analog meter adopted • Low-price • Recorder output attached • Compact and light-weight • For pressure monitoring • For research and development |
Product specification
| Measuring range | 1.3 X 102 to 1.3 X 10-1Pa | |
| range | 1-range | |
| Measurement | constant voltage measuring circuit | |
| REC OUT output | DC 0 to 10mV | |
| Service temperature | 0 to 40ºC | |
| Power voltage | AC100V 50/60Hz 2VA | |
| Gauge head | P-3 ф15 | |
| Mass | Main body | 700g |
| Gauge head | 100g | |
| Exterior dimension drawing | [PDF] [DXF] | |
| Panel cut dimension | ||
| Standard attachment | Gauge head:P-3(ф15)Power cord:2m (Connected to the main body directly)Measuring cord:4m (Connected to the main body directly) | |
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