PDC200/PDC210/PDC510-日本YAMATO等离子清洗机PDC210-安捷来国际股份（香港）有限公司

日本YAMATO等离子清洗机PDC210：

Plasma Cleaner

PDC-200/210/510

Model
200	210	510
Plasma Mode
RIE		RIE/DP
RIE: Reactive Ion Etching DP : Direct Plasma
High-frequency Output
Max.300W	Max.500W
Oscillating Frequency
13.56 MHz
Dimension of Stage(mm)
250×170		410×170

Purpose :RemovalofOrganic films, Surface cleaning, Surface reforming,Surfaceetchingetc.

Despite being desktopmodels,theyfeature high performance, are simple to use, and canobtaindataeasily.
They are genuine RIE systems,andcanbe DP systems with the use of options.

Interior

Composition figure

Specifications

Model	PDC-200/210/510
PlasmaMode	PDC-200(RIEorDP)/ PDC-210(RIE and DP)
MainUnit
Aluminumchamber	Internaldimension: 400mmW×250mmD×150mmH
Electrode	Parallelflatstageplate: 230mmW×170mmD
Vacuumgauge	Capacitancemanometer
Reactiongas system	Twosystems(Ar,O2)
Controller	Programmablecontroller
Display	LCDTouchpanelDisplay
Radio-FrequencyPower Supply
Input	PDC-200:AC100V,Single phase, 8A (50/60 Hz) / PDC-210: AC200V,Threephase,15A (50/60 Hz)
Radio-frequency output power	PDC-200:300W/PDC-210:500W
Referenceoscillator	Quartzoscillator
Oscillating frequency	13.56 MHz
Matchingadjustment	Automatictuning
Discharge System(Vacuum Pump) only PDC-210 / PDC200 Optional
Displacement	Total345liters/min.
Inputpower supply	Threephases,AC200V, 4A, 50/60 Hz / PDC-200Singlephase,AC100V,4A,(50/60Hz)
Inletconfiguration	NW25
Outletconfiguration	NW25
GasSystems
Purgegas	Nitrogen (N2)andaregulator (3 kgf/cm2) with a manometer
Reactiongas G1	Oxygen (O2)andamass flow controller (500 secm) / PDC-200:(200 secm)
Reactiongas G2	Argon (Ar)andamass flow controller (100 secm)
SafetyMechanisms
SystemProtections	(1)WatchingVacuumPump and RF generater Watching over current by Thermal Protector Magnetic relay. (2) Product Quartz oscillator When Matching unit have miss matching,protectquartzoscillator. (3) Door Panel Inter lock Build Inter lock switch.
Actions againsta trouble of the vacuum pump	Theplasmascrubbertakes the counteractions listed below and show anAlarmmessage onits display when something wrong happens on thevacuumpump. The main valve closes The gas feed valve closesTheisolationvalve closes The oscillator stops outputtingTreatmentprocess issuspended The Alarm buzzer starts sounding*Thetreatment processtimer stops.
REQUIREDUTILITIES
PowerSupply
Main unitwith vacuum pump	PDC-200: Single phases, AC100V,15A,50/60Hz PDC-210: Three phases, AC200V, 15 A, 50/60Hz (with an accessory power cable of 3 meters long,andexposedcrimp-style terminals of 8 millimeters long)
Gases
Purgegas	Nitrogen(N2)(Feedpressure: 2～7 kgf/cm2)
Reactiongas G1	Oxygen(O2)(Feedpressure: 1.5 kgf/cm2)
Reactiongas G2	Argon(Ar)(Feedpressure: 1.5 kgf/cm2)
Connectionport	1/4"swagelokjointbulkhead union (SS-400-61)
	Note:Pressureregulators, filters and other protective devicesshall bepreparedby others.
ConnectionDiameterof the Discharge Duct (andinletPort)
Vacuumpump's inlet port	NW25(withaflexible stainless steel hose of 1 meter long)
Vacuumpump's outlet port	NW25
	Note:Everyporthas a connector designed foraflexiblehose.