设备简述/Equipment Brief
ZY-11弧离子镀膜机是我公司自主研发的超硬膜离子镀膜机,采用的新型过滤弧源镀膜技术、等离子体增强阳极辅助镀膜技术,规划了炉体内等离子体的路线和分布,增强了刻蚀效果,提高了离化率,使得靶材表面被均匀刻蚀,涂层表面更光滑致密,提升了涂层的结合力,确保了涂层厚度及涂层的均匀性。同时,新技术的应用提高了镀膜效率,节约了能耗和运行成本。
ZY-1110 Big Arc ion vacuum coating machine is a super hard film ion coating machine, self-developed by IKS, adopted unique new filter arc source coating technology, plasma enhanced and anode assisted coating technology, the route and distribution of plasma inside of the furnace are planned, the ionization rate of the target material was enhanced, So that the surface of the target is etched uniformly, the coating surface is smooth and compact while the bonding force of the coating is optimized, ensure coating thickness and uniformity. Meanwhile, the application of new technology improves the efficiency of coating, saves energy and operation cost.
设备参数/Equipment Parameters
炉体尺寸Chamber Size | Ф1180XH1050 | 有效空间Effective Space | Ф800XH650 |
应用技术Applied Technology | IET+ BIG ARC | 靶材数量Quantity of Target Material | IET2+ARC9 xφ160 |
标准涂层Standard Coating | TiN, CrN, AlCrN, etc. | 其他复合涂层Other Composite Coating | TiAlCrN, TiSiN,TiAlCN,etc. |
生产周期Production Cycle | 4-6小时/炉4-6hours/furnace | 外围尺寸Overall Dimension | L5800XW2100XH2100mm L4800XW3000XH2100 |
使用范围Rang of Application | 适用于滚刀,钻头,棒状铣刀,微钻,刀粒等。Hobs,drills,stick milling cutter, micro-drill, cutter grain, etc |
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