- 全金属结构，超洁净
- 流量范围广：1 CCM - 50 LM
- 高温型号可选（PV-1000S/2000S）
- 外部单元压力控制
PV-1000
| Flow Range | 1/5/100/200/500 CCM 1/2/5 LM (Inlet:atmospheric pressure•Outlet:vacuum•N2equiv) |
|---|---|
| Flow Control Range | 2 -99% F.S. |
| Valve Type | normally open / close |
| Input Signal | 0 - 5VDC |
| Responce | less than 0.5 sec. |
| Operating Temperature | 0 - 50 °C |
| Operating Diffential Pressure | MAX. 300 kPa(a)(max,42psi) |
| Pressure Resistance | 1MPa |
| Leak Integrity | 5×10-12Pa•m3(He) |
PV-2000
| Flow Range | 10/20 LM |
|---|---|
| Flow Control Range | 2 -99% F.S. |
| Valve Type | normally open / close |
| Input Signal | 0 - 5VDC |
| Responce | less than 0.5 sec. |
| Operating Temperature | 0 - 50 °C |
| Operating Diffential Pressure | MAX. 300 kPa(a)(max,42psi) |
| Pressure Resistance | 1MPa |
| Leak Integrity | 5×10-12Pa•m3(He) |
外形尺寸
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